Lithium nickel vanadate thin films were prepared by radio frequency magnetron sputtering at various substrate temperatures (T-s). These thin films have been investigated as anode electrode material in the use of microbatteries. Films were characterized by Rutherford backscattering spectroscopy, nuclear reaction analysis, Auger electron spectroscopy, glancing-incidence X-ray diffraction analysis, Raman spectroscopy, scanning electron microscopy, atomic force microscopy, and high-resolution transmission electron microscopy techniques. The anodic electrochemical performances of the films have been evaluated by cyclic voltammetry at a scan rate of 1 mV/s and by galvanostatic cycling, with lithium metal as the counter and the reference electrode, and cycled in the range of 0.02-3.0 V at a current density of 75 mu A/cm(2). Thin films prepared at a T-s of 650 degrees C show a discharge capacity at the 20th cycle of 1100 (+/- 10) mAh/g, which exhibited excellent capacity retention with a small capacity fade.