Nanostructured films of iron, tin and titanium oxides were grown on glass and quartz by gas phase decomposition of [Fe(O'Bu)(3)](2), [Sn(O'Bu)(4)] and [Ti(O'Pr)(4)], respectively. Films obtained exhibit good adhesion and homogeneous morphology with structural features in the nanometer range. The influence of microstructure and phase on optical (alpha-Fe2O3 and Fe3O4), gas sensing (SnO2) and photocatalytic (TiO2) properties was systematically studied to explore the potential of these coatings for technological applications. (c) 2005 Elsevier B.V. All rights reserved.