화학공학소재연구정보센터
Polymer, Vol.47, No.9, 2942-2945, 2006
A novel negative photoinitiator-free photosensitive polyimide
A novel negative photoinitiator-free photosensitive polyimide (PFPS-PI) was synthesized through introducing the photosensitive 4,4-bis[(4-amino)thiophenyl] benzophenone (BATPB) into backbone chain and methyl acrylate group into side-chain of the polyimide, respectively. Photosensitive properties study revealed its good photolithographic properties, with a resolution about 5 put, and a sensitivity of 150 mJ/cm(2). (c) 2006 Elsevier Ltd. All rights reserved.