Recently, surface plasmon resonance (SPR) has been successfully implemented to characterize the film stability in real time: a radio frequency (RF) plasma polymerized film was monitored by swelling or extracting behaviors in aqueous solution. The high-resolution SPR revealed that film stability strongly depended on the monomers, plasma mode, and substrate locations as well as plasma polymerization conditions: incident power and working pressure. By Fourier transform infrared (FTIR), the possible reasons of film stabilization affected by plasma conditions and sample locations are explained. It is recommended that as an adhesive layer for future applications the plasma polymerized polymer shall be prepared in low working pressure pulsed plasma.