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Journal of the Electrochemical Society, Vol.153, No.7, C521-C525, 2006
An approach to the development of organic additives for electrodeposition of narrow copper interconnects
We have characterized the electrochemical properties and wetting effects of various organic materials, including selected accelerators, suppressors, and wetters, for the electrodeposition of submicrometer-wide copper interconnects. An additive composition consisting of the following organic chemicals was tested: bis(3-sulfopropyl)-disulfide, disodium salt as an accelerator, polyethylene glycol as a suppressor, and a cross-linked polyamide as a second suppressor (working also as a wetter). Copper films plated using this makeup exhibited a surface roughness of similar to 35 nm after annealing, with grain sizes on the order of 0.1-0.5 mu m, and an electrical resistivity of similar to 1.9 mu Omega cm. Using this made-up solution, 120 nm wide trenches were successfully gap-filled. (c) 2006 The Electrochemical Society.