Proceedings of the Joint Meeting of the 71h APCPST (Asia Pacific Conference on Plasma Science and Technology) and the 171h SPSM (Symposium on Plasma Science for Materials) Fukuoka, Japan, June 29 July 2, 2004 - Preface

Watanabe Y; Asano T; Chang HY; Fujiyama H; McWilliams R; Watanabe T

Thin Solid Films, Vol.506, 1-1, 2006

DOI10.1016/j.tsf.2005.08.012 Export Citation

Proceedings of the Joint Meeting of the 71h APCPST (Asia Pacific Conference on Plasma Science and Technology) and the 171h SPSM (Symposium on Plasma Science for Materials) Fukuoka, Japan, June 29 July 2, 2004 - Preface

Watanabe Y, Asano T, Chang HY, Fujiyama H, McWilliams R, Watanabe T