Performance of ac driven ferro-electric packed bed reactor for perfluoroethane (C2F6) gas removal from simulated semiconductor process gas is described in this paper. Hollow cylinder shape (3.2 mm o.d. 1.4 mm i.d. 4 mm length) is employed as BaTiO3 ferro-electric pellet to improve the removal efficiency. The pellets are packed in the rectangular parallelepiped reactor with dimension 12 cm x 10 cm x 30 cm. The 3000 ppm C2F6 gas diluted with nitrogen is used with gas flow rate of 1 L/min. The reactor shows the 20% C2F6 is removed with energy efficiency of 2.2 g/kW h. (c) 2005 Elsevier B.V. All rights reserved.