The annealing effects on the surface plasmon resonance induced absorption band of a Ti-SiO2 nanoparticle composite have been reported. Low energy ion implantation followed by thermal annealing is found to improve the surface plasmon resonance (SPR) absorption of Ti nanoparticles, a result that is different from substrate heating during implantation. The SPR absorption becomes distinguishable when the temperature is greater than 200 degrees C and reaches its maximum at similar to 600 degrees C. The intensity decreases significantly at higher temperatures due to high temperature enhanced diffusion which lowers the local Ti concentration and the possible formation of titanium oxides and silicides. A blueshift of the SPR absorption induced by annealing is also observed. (c) 2006 American Vacuum Society.