Electrical and morphological properties of poly(3,4-ethylenedioxythiophene) (PEDOT) thin films electrodeposited on gold-on-silicon electrodes by galvanostatic, potentiostatic, and potentiodynamic methods have been determined using current sensing atomic force microscopic experiments. Surface morphologies and vertical conductivities of PEDOT films were affected by the experimental parameters including the preparation method, the current density, the potential, and the potentiodynamic cyclic number. Band gaps obtained from current-voltage curves of dedoped PEDOT were in excellent agreement with those obtained from absorption spectra. When the film thickness was increased on the gold-on-silicon electrode, the topographic images were not very well defined due to the high roughness but conductivities increased significantly in all the galvanostatically, potetiostatically, and potentiodynamically grown PEDOT films.