CdS-ZnS layered thin films have been fabricated with using ZnS/glass layer prepared by chemical bath deposition as the seed. followed by deposition and crystallization of US thin films on its surface by hydrothermal reaction. X-ray diffraction, Ultraviolet-Visible absorption spectroscopy, Scanning Electron Microscopy, Transmission Electron Microscopy, and Confocal Raman spectroscopy were used to characterize the thin films. It was found that through adjusting the hydrothermal reaction condition. the thickness, crystal size, and optical properties of the CdS-ZnS heterostructure films can be finely controlled. (c) 2006 Elsevier B.V. All rights reserved.