Oxidation of Hf metal films on Si appears to follow different charge generation rules than the traditional oxidation of Si described in detail by Deal et al. [B.E. Deal, M. Sklar, A.S. Grove, E.H. Snow, J. Electrochem. Soc. 114 (1967) 226]. Oxidation of thin Hf metal films oil silicon in oxygen rich environments to form Hf-silicate results in rapid growth of silicon oxide interfacial layers and generation of significant charge concentration in the films. Oxidation of Hf in oxygen-deficient environment leads to improved control of the interface with Much thinner interfacial layers and substantial reduction in the charge present in the films. Results from capacitance vs. voltage and X-ray photoelectron spectroscopy measurements are compared to correlate charge with chemical Structure evolution during oxidation and dielectric layer formation. It is demonstrated that processing conditions may influence the quality of the Hf dielectric film significantly by generating positive charge that is not intrinsic to the material. (c) 2006 Elsevier B.V. All rights reserved.