Poly(ethylene glycol) (PEG) self-assembled monolayers (SAMs) are surface coatings that efficiently prevent nonspecific adhesion of biomolecules to surfaces. Here, we report on SAM formation of the PEG thiol CH3O(CH2CH2O)(17)NHCO(CH2)(2)SH (PEG(17)) on three types of Au films: thermally evaporated granular An and two types of Au films from hydrogen flame annealing of granular Au, Au(111), and An silicide. The different Au surfaces clearly affects the morphology and mechanical properties of the PEG(17) SAM, which is shown by AFM topographs and force distance curves. The two types of SAMs found on flame-annealed Au were denoted "soft" and "hard" due to their difference in stiffness and resistance to scratching by the AFM probe. With the aim of nanometer scale patterning of the PEG(17), the SAMs were exposed by low energy (1 kV) electron beam lithography (EBL). Two distinctly different types of behaviour were observed on the different types of SAM; the soft PEG(17) SAM was destroyed in a self-developing process while material deposition was dominant for the hard PEG(17) SAM. (c) 2006 Elsevier Inc. All rights reserved.