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Journal of the Electrochemical Society, Vol.153, No.11, C755-C760, 2006
Mass-transfer characterization of a propeller plating cell for microelectromechanical systems
A hydrodynamic method based on a three-blades rotating propeller in a horizontal plating cell was studied. Linear sweep voltammetry in a dilute copper solution is used to measure the limiting current. Mass-transfer correlation shows that the system yields steady-state flow that is in excellent agreement with the existing model developed by Levich for a rotating disk electrode, suggesting that the laminar flow established in the cell is analogous to that seen at the rotating disk. Chronoamperometry and deposition under limiting current conditions show that the mass-transfer diffusion layer is uniform in temporal and spatial terms. (c) 2006 The Electrochemical Society.