Scanning electrochemical microscopy (SECM) was used for imaging of n-hexadecanethiol-modified Au surfaces. In these studies, small defects were observed in the monolayer when a submicrometer electrode was used as an SECM tip, although a cyclic voltammogram of a Au disk electrode showed that the surface of the Au was completely covered with n-hexadecanethiol. The dependence of the SECM images on the potential of the Au electrode was also examined. A comparison of the current at the Au electrode and the tip current in the SECM images showed that direct electron transfer through the monolayer was dominant, rather than electron transfer at the defects. The size of the defects was estimated from the tip current to be 1-100 nm, under the assumption that the defects were small compared to the SECM probe.