Chemical Reviews, Vol.96, No.4, 1499-1517, 1996
Role of Surface-Chemistry in Semiconductor Thin-Film Processing
Keywords:CHEMICAL-VAPOR-DEPOSITION;ATOMIC LAYER EPITAXY;OPTICAL 2ND-HARMONIC GENERATION;MOLECULAR-BEAM EPITAXY;HETEROJUNCTION BIPOLAR-TRANSISTORS;SINGLE-CRYSTALLINE SILICON;ENERGY-LOSS SPECTROSCOPY;2ND HARMONIC-GENERATION;GROWTH-RATE ENHANCEMENT;P-CHANNEL MOSFETS