FeTiO3 powder was prepared via a liquid mix and H-2/H2O reduction process. First, an intermediate compound was synthesized by a liquid mix process. This precursor compound to FeTiO3 was characterized by thermal analysis (TG/DTA) and Fourier Transform Infrared spectroscopy (FT-IR). Second, the precursor was annealed in the air, H-2/H2O(g) mixing gas stream, respectively. The obtained powder was characterized by X-ray diffraction (XRD), energy dispersive X-ray analysis spectroscopy (EDAX) and scanning electron microscope (SEM). It was showed that pure and homogenous FeTiO3 was successfully obtained below 600 degrees C.