The solid electrolyte 12CaO center dot 7Al(2)O(3) (Cl2A7) is an interesting material where an atomic oxygen radical anion (O-) can be emitted from the C12A7 to vacuum when it is heated to 1000 K under an applied electric field (100 V/cm). However, the mechanical strength of the C12A7 is not enough for an application study. In order to enhance the mechanical strength of the C12A7, a magnesia-stabilized zirconia (MSZ) support C12A7 film composite was developed, and ion emission from the MSZ/C12A7 composite was investigated. The MSZ/C12A7 composite showed O- emission and also electron emission. The generated O- was applied to a silicon sample to confirm its oxidation ability. Even though the surface temperature is less than 383 K, SiO2 film formation was achieved. This O- oxidation method is applicable for low-temperature and low-damage silicon oxidation processes. (c) 2006 Elsevier B.V. All rights reserved.