All solid-state thin film batteries consisting of an amorphous Li-V-Si-O (LVSO) solid electrolyte, layered rocksalt LiCoO2 and spinel phase LiMn2O4 cathodes, and amorphous SnO anode were fabricated only by sequential pulsed laser deposition (PLD) technique. The crystal structure of the cathode films was characterized by XRD. The post-annealed cathode films exhibit the characteristic crystal structures while as-deposited cathode films are amorphous or partially crystallized. The rough surface is observed for the post-annealed films. The thin-film battery was characterized by a FE-SEM, charge-discharge measurements and cyclic voltammetry. As well as the LiCoO2, the new cathode film of LiMn2O4 can be utilized for all-solid-state batteries, and their electrochemical properties are reported. The capacities of the thin-film batteries with annealed cathode films are 10 times larger than that of the as-deposited films. The as-deposited film shows a very low capacity even in the liquid electrolyte cell system. (c) 2006 Elsevier B.V. All rights reserved.