The deformation behaviour of diamond-like carbon (DLC) coatings on silicon substrates induced by indentation has been investigated. DLC coatings, deposited by a plasma-assisted chemical vapour deposition technique, were subjected to nanoindentation over a range of maximum loads from 100 mN to 300 mN. The resulting load-displacement plots displayed pop-ins for maximum loads of 200 mN and above, with no distinct pop-out for any of the loads studied. Compressive deformation of the coating, up to a strain of similar to 9%, was observed. The coating-substrate composite was devoid of cracks at lower loads, but at the maximum load of 300 mN, ring cracks in the coating and a median crack in the substrate were observed. Furthermore, cracking, {111} slip and localized phase transformations were observed in the silicon substrate. The onset of these structural changes was correlated to the mechanical behaviour during indentation. (c) 2006 Elsevier B.V. All rights reserved.