SiC nanostructured coatings were synthesized by ballistic impaction of nanoparticles using a process called hypersonic plasma particle deposition (HPPD). X-ray diffraction spectra of typical samples showed the presence of crystalline SiC and Si. Grain sizes obtained through transmission electron microscopy showed particles in the sub 10 nm range with primarily crystalline beta-SiC and some crystalline Si particles present. These results correlate well with particle size distributions measured using an aerosol sampling probe coupled to a scanning electrical mobility spectrometer. Interestingly, particle size distributions indicated only small changes in the particle size distributions when Si deposition was compared to SiC. Examination of adhesion characteristics highlighted the importance of a chemically bound interlayer during SiC deposition on Mo and steel substrates. (c) 2006 Elsevier B.V. All rights reserved.