A significant effect of the introduction of O-2-plasma discharge during pulsed laser ablative deposition of SrBi2Ta0.8Nb1.2O9 (SBTN) films on improving the crystallite orientation, ferroelectric, and optical properties has been described. Plasma-excitation potential, applied at an auxiliary-ring electrode placed near the substrate, has a profound effect on surface morphology, crystallite orientation, remnant polarization, and optical constants. Compared with no plasma assist, the films have an additional strong (008) and (200) and an approximate 32% multiplication in remnant polarization. The refractive index (n similar to 2.27) with plasma is greater than the corresponding values (n similar to 2.16) of no plasma. Clearly, the presence of O-2 plasma assists in the growth of SBTN films, which display much improved ferroelectric and optical properties. (c) 2007 American Vacuum Society.