화학공학소재연구정보센터
Journal of Vacuum Science & Technology B, Vol.24, No.6, 2765-2768, 2006
Interconnecting single nano-objects on surfaces for transport experiments
The authors report a highly controlled approach, based on electron-beam lithography, to interconnect individual nano-objects for transport experiments. The process is based on a three-Step procedure, consisting of fabrication of four alignment markers, localization of the nano-object after its immobilization onto functionalized surfaces, and interconnection of the single nanostructure by patterning two nanoelectrodes on its sides. The approach is highly reproducible and widely applicable and allows an alignment accuracy of 15-20 nm. Here they demonstrate the reliability of such technique by using a thin triangular gold nanoprism as the active element and show the I-V characteristics of the single nanostructure. (c) 2006 American Vacuum Society.