Polyhedral oligomeric silsesquioxane (POSS) meets increasing interest as a building unit for inorganic-organic hybrid materials. The incorporation of cyclopentyl-substituted POSS (CpPOSS) into polystyrene (PS) thin films led to an inhibition of dewetting. In this paper, the dispersion state of CpPOSS in the CpPOSS/PS hybrid films and, furthermore, the relationships between the structure and dewetting inhibition effect are discussed. Structural analysis of the hybrid films revealed that CpPOSS segregated to the film surface and crystallized. The segregation of CpPOSS to the surface changes the surface free energy and spreading coefficient of the film. Interfacial structure was also roughened by the segregation of CpPOSS, which can contribute to the inhibition of dewetting by pinning the contact line of the PS film with the substrate. The inhibition of dewetting can be attributed to the modification of the film surface and interface by the segregation of CpPOSS.