In the present communication the results of the synthesis, the quantum chemical (QC) and the spectral examination of the SiO thin film and powder are reported. The QC and Raman studies indicate the formation of the Si clusters inside the bulk of the SiO protoparticle at the very first stages of its gas-phase growth. Infrared, Raman, inelastic neutron scattering and electron spin resonance spectra for the synthesized SiO thin films and the commercial sample have been recorded and simulated in order to verify the theoretical model. The QC calculated radial distribution function and vibrational spectra reproduce well the experimental ones. (c) 2006 Elsevier B.V. All rights reserved.