Titania-containing Polyarylene ether nitriles (PEN) hybrid films have been successfully fabricated via in-situ sol-gel process, nanosized TiO2 particles are found well dispersed within the polymer matrix. The dielectric properties of the films were measured to find that dielectric constant as well as dielectric loss of the hybrid films increased linearly with the increasing TiO2 content without sacrificing dielectric breakdown strength compared to that of the pristine polymer. Increased gel temperature reduced dielectric loss efficiently but has little influence on dielectric constant. (c) 2006 Elsevier B.V. All rights reserved.