화학공학소재연구정보센터
Thin Solid Films, Vol.515, No.4, 1942-1949, 2006
The effects of zinc acetate and zinc chloride precursors on the preferred crystalline orientation of ZnO and Al-doped ZnO thin films obtained by spray pyrolysis
The effects of Zn acetate or/and Zn chloride as ZnO precursors have been studied on the c-preferred orientations of pure ZnO and ZnO films doped with aluminium obtained by spray pyrolysis. We have used aluminium nitrate and aluminium chloride as precursors for aluminium doping. The experiment uses factorial designs to reveal possible interactive effects between the ZnO precursors, and the aluminium doping on the crystalline texture obtained. We have determined the conditions to obtain c-preferred orientated thin films using mixtures of both ZnO precursors. (c) 2006 Elsevier B.V. All rights reserved.