화학공학소재연구정보센터
Thin Solid Films, Vol.515, No.4, 2523-2526, 2006
Broadband Mo/Si multilayer analyzers for the 15-17 nm wavelength range
Aperiodic molybdenum/silicon broadband multilayer analyzers with constant reflectivity over a wide spectral range for a fixed incidence angle have been designed using a combined analytical/numerical method. The analyzers were fabricated using direct current magnetron sputtering and characterized using the soft X-ray polarimeter at the BESSY facility. Nearly constant s-reflectivity, up to 37%, is observed over the 15-17 nm wavelength range at a grazing incidence angle of 50 degrees, and the degree of polarization is over 98%. Furthermore, the analyzer also exhibits high s-reflectivity and polarization over a broad angular range, 43-53 degrees, at a fixed wavelength of 15.5 m. This kind of broadband multilayer analyzer can be used in extreme ultraviolet polarization measurements, and will greatly simplify experimental arrangements. (c) 2006 Elsevier B.V All rights reserved.