Plasma polymerization was used to produce thermoresponsive hydrogel films of N-isopropylacrylamide (NIPAAm) in a single deposition step. Solvent free processing to produce laterally confined intelligent hydrogel films offers the potential for high volume production of micro-sensors/actuators. Through variation of reactor conditions such as deposition pressure and substrate temperature, it is possible to tailor and control chemical properties of the films such as crosslink density and thus swelling. Fabrication of hydrogel thin films with adequate crosslinks is critical to ensuring adhesion to substrates and stability in aqueous environments. Chemical bonding structures in plasma polymerized NIPAAm were studied using Fourier transform infrared spectroscopy and the thermoresponsive nature of plasma polymerized NIPAAm was confirmed through contact angle goniometry. A reversible temperature dependent contact angle change was observed. (c) 2006 Elsevier B.V. All rights reserved.