In recent years, a great deal of attention has been focused on the development of quantum wire transistors as a means of extending Moore's law. Here the authors present results of fully three-dimensional, self-consistent quantum mechanical device simulations of InAs trigate nanowire transistor. The effects of inelastic scattering have been included as real-space self-energy terms. They find that the position of dopant atoms in these devices can lead to a reduction in the amount of scattering the carriers experience. They find that the combination of deeply buried dopant atoms and the high energy localization of polar optical phonon processes allow devices to recover their ballistic behavior even in the presence of strong inelastic phonon processes. (c) 2007 American Vacuum Society.