Previous Article Next Article Table of Contents Journal of Vacuum Science & Technology B, Vol.25, No.1, 289-291, 2007 DOI10.1116/1.2402149 Export Citation Mesa structures of GaAs fabricated by nanoparticle mask under gas-cluster ion-beam irradiation Yamada S, Nagano M, Houzumi S, Toyoda N, Yamada I Please enable JavaScript to view the comments powered by Disqus.
