In this study, the effect of IZO thin films on efficiency of dye sensitized solar cell (DSSC) with low temperature process was investigated after IZO thin films were prepared by radio frequency (rf) magnetron sputtering technique at room temperature by varying rf power. Finally, the efficiency of DSSC has been greatly enhanced from 0.95% up to 1.65% as transmittance increases up to about 90% in the visible light region, which exhibits promising application of this new IZO in the field of DSSC.