In this study, indium zinc oxide (In2O3-ZnO, IZO) thin films were prepared for the fabrication of flexible dye sensitized solar cell (DSSC) on polyethylene terephthalate (PET, 175 μm) substrate by radio frequency (rf) magnetron sputtering with variation of rf power, gas pressure and distance of target to substrate. Finally, the transmittance of IZO thin film exhibited more than 82% in the visible light region and the specific resistivity value as low as 3.7 x 10^-4 Ω cm was obtained. In particular, the IZO films deposited in this work were prepared at room temperature without any high temperature annealing.