A pilot-scale semiconductor deposition system for the continuous production of CdTe based solar cells has been developed. During initial process optimization it was found that glass superstrates needed to be cooled before the back contact application. In order to shorten the cycle time for cooling glass superstrates, a close contact cooling apparatus with conduction through the gas phase for use in a vacuum chamber is being developed. Initial measurements of the cooling rates for a test cooling apparatus indicate that 76 x 76 x 2 mm(3) superstrates can be cooled from 170 to 30 degrees C in a period of 4 min. (c) 2007 American Vacuum Society.