Microfabri cation of a microarcjet with Fifth-harmonic generation Nd:YAG pulses (wavelength 213 nm) and its plasma acceleration characteristics was investigated. The microarcjet with a rectangular exit of 0.44 mm in height was machined in a 1.2 mm thick quartz plate. For electrodes, Au films of 100 nm in thickness were coated on a divergent part of the nozzle for anode and an inner wall surface for cathode. In operational tests, a stable discharge was observed for mass flow of 1.0 mg/s, discharge current of 6 mA, discharge voltage of 600 V, or 3.6 W input power. With the 3.6 W input power, plasma speed of 1441 m/s and an energy efficiency of 7% were obtained. (c) 2006 Elsevier B.V. All rights reserved.