Lithium niobate films grown epitaxially on sapphire substrate were prepared using a thermal chemical vapor deposition method from the metalorganic compounds Li(C11H19O2) and Nb(OC2H5)(5). The range of operating conditions for obtaining pure epitaxially grown LiNbO3 without other oxides is within that for obtaining pure polycrystalline LiNbO3 grown on silicon substrate. On analyzing the composition of the epitaxially grown LiNbO3 film, the composition of the film was similar to that of the LiNbO3 solid solution in the phase diagram of the Li-Nb composite oxide obtained for crystal growth from a molten solution. (c) 2006 Elsevier B.V. All rights reserved.