Carbon nanotube (CNT) and one-dimensional ZnO are two of the most important nano materials for which continuous efforts are being made for the development of novel processes. In this paper we present new approaches for the growth of CNTs and ZnO nanorods. Through the selection of an appropriate catalyst, namely, Fe-Si thin film, aligned CNT can be obtained at a temperature as low as 370 degrees C using a conventional microwave plasma-enhanced chemical vapor deposition (MPCVD) technique. This is attributed to the fact that the addition of Si greatly enhances the carbon diffusion such that a fast reaction-controlled growth is obtained. Also, with the use of a decisive electroless copper layer deposited on Si or glass substrate, semi-aligned ZnO nanorods can be obtained at the room temperature. It was found that the residual stress in the electroless copper is the key to the formation of ZnO nanorods. (c) 2006 Elsevier B.V. All rights reserved.