Effective diffusion coefficients of self-interstitials and vacancies in interactive diffusion in silicon in oxidizing atmosphere (vol 154, pg H86, 2007)

Yoshida M; Gosele U; Morooka M; Tanaka S

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Journal of the Electrochemical Society, Vol.154, No.7, S16-S16, 2007

Effective diffusion coefficients of self-interstitials and vacancies in interactive diffusion in silicon in oxidizing atmosphere (vol 154, pg H86, 2007)

Yoshida M, Gosele U, Morooka M, Tanaka S