The development of environment friendly type thin film solar cell Cu2ZnSnS4 (say CZTS-type) fabricated using abundant materials is introduced in this paper. Three RIF sources co-sputtering continued with vapor phase sulfurization method (inline-type vacuum apparatus) is utilized. Those processes were sequentially done in different apparatus in our previous work. In this study, an inline-type vacuum apparatus is firstly introduced to acquire higher quality of CZTS films. Inductively Coupled Plasma Spectroscopy (ICPS) is used to analyze the minute material composition of CZTS thin film solar cell. By optimizing the material composition, 5.74% of conversion efficiency is obtained. It is the best data for CZTS-type thin film solar cells at present. (C) 2007 Elsevier B.V All rights reserved.