Thin films containing beta barium borate (beta-BaB2O4 so called beta-BBO) were grown on silicon (100) substrates by injection metal organic chemical vapour deposition for different deposition temperatures. The films were characterized by optical microscopy, micro-Raman spectroscopy and X-ray photoelectron Spectroscopy (XPS). The micro-Raman spectra show an intense peak at 637 cm(-1) that is the fingerprint of beta-BBO. Our XPS analysis permits the measurement of the Ba, B and O core levels, which are reported here for the first time for beta-BBO thin films. The formation of a new spectral component appearing with lower growth temperatures has been observed as well. (C) 2007 Elsevier B.V. All rights reserved.