A carbon film was deposited on Si substrate from an ethanol liquid phase by electrolysis at low temperature (60 degrees C) in ambient atmosphere, and various carbon phases in the film were investigated by micro-Raman spectroscopy. Raman spectroscopy analysis confirmed the crystalline diamond structure by the presence of a sharp peak at 1331 cm(-1). Meanwhile, short-chain polyethylene, hydrogenated amorphous diamond-like and glassy carbon phases were found in the films.