This paper investigates the effect of electric field upon the atomic layer-controlled growth of ZnO on the (0001) sapphire substrates, The results indicated, for the first time, that electric field could make remarkable growth difference for the ZnO films with this method. With a proper electric field, higher quality of epitaxial films has been obtained. Comprehensive analyses revealed that electric field-induced increase of the hydroxyl packing density on the substrate surface could account for the results. (C) 2002 Elsevier Science B.V. All rights reserved.