Uniform ZnO nanoparticles have been prepared via a convenient thermal decomposition approach, in which beta-cyclodextrin (beta-CD) is selected to coat the precursor of zinc acetate. The decomposition process of this system is investigated by thermogravimetric and differential thermal analysis (TG-DTA). TEM or AFM studies reveal that ZnO nanoparticles and the corresponding film doped on the silicon substrate by this method present weak agglomeration and regular size distribution. The possible formation mechanism of ZnO nanoparticles under the effects of O-CD coating is also discussed. (C) 2003 Elsevier Science B.V. All rights reserved.