The reaction of SiHCl3 with atomic O(P-3) has been studied theoretically for the first time. In C, symmetry, two nearly degenerate saddle points of (3)A" and (3)A' symmetries have been located. The kinetics nature has been deduced using canonical variational transition state theory (CVT) with small-curvature tunneling (SCT) correction over a wide temperature range of 200-3000 K. The calculated CVT/SCT rate constants show reasonable agreement with the available experimental values, with a more pronounced curvature in the Arrhenius plot than in the experimental data. (C) 2003 Elsevier B.V. All rights reserved.