Cu2O nanodots have been grown on LaAlO3 (0 0 1) Substrates using metalorganic chemical vapor deposition. X-ray diffraction reveals that the nanodots grow epitaxially on the substrate. The dots are hut-shaped islands with {1 1 1} side facets. Evolution of the nanodot shape, density, and size during growth has been analyzed by scanning electron microscopy and atomic force microscopy. It is shown that Ostwald ripening plays an important role in nanodot growth. (C) 2004 Elsevier B.V. All rights reserved.