Nowadays, chemical and other industrial process plant is expected to meet increasingly stringent demands with respect to performance parameters and service life. Exact knowledge and comprehensive documentation of plants are of increasing significance in the various tasks involved in their operation, maintenance, modification and expansion. In developing this documentation, industrial measuring systems and the process of close-range photogrammetry are the ideal tools for an appropriate determination of 3D geometry, yielding results which are suitable for many applications. A distinction is made between the higly accurate determination of the dimensions of special components and the actual as-built plant documentation pertaining to larger plant segments or entire plants. A detailed description of the framework conditions and the processes of determining 3D geometry in industrial plant can be found in the VGB bulletin of the same title [1].