Chemistry Letters, Vol.31, No.12, 1196-1197, 2002
Fabrication of three-component micropatterned organosilane monolayer by a stepwise photolithography process
Three-component micropatterned organosilane monolayer was successfully fabricated on Si-wafer substrate by a stepwise photolithography process. Scanning force microscopic observations revealed that three kinds of organosilane monolayers with different physicochemical properties were area-selectively immobilized on a Si wafer.