화학공학소재연구정보센터
Chemistry Letters, Vol.32, No.2, 178-179, 2003
Photocleavage processes in an iminosulfonate derivative usable as photoacid in resist technology
The cleavage process of an immosulfonate was studied through time resolved laser spectroscopy. The SO-S, and SO-T, transitions were located on the oxime moiety. Under excitation, the cleavage process occured through a singlet mechanism. Under sensitized excitation, an efficient cleavage of the N-O bond occured in the triplet state of the iminosulfonate. The photoreactivity of this compound was compared to that of parent photobase generators (the O-acyloximes) based on the same oxime chromophore.