Electrically detected magnetic resonance (EDMR) imaging is a method to investigate the distribution of a paramagnetic recombination center in semiconductor materials. The EDMR image of a rectangular silicon plate (width, 2 mm; length, 20 mm; thickness, 0.5 mm; resistance, 5 kOmega(.)cm) was obtained under partial light illumination that was limited to the center of the sample. The sample had a native uniform distribution of paramagnetic recombination center and showed no EDMR signal without illumination. Low or high intensity area was located at the center (illuminated area) or sides (nonilluminated area) in the EDMR image. The patterns were the same when the opposite direction of the DC current was applied to the sample.