Chemistry Letters, Vol.34, No.10, 1414-1415, 2005
3D nanoarchitecture from ultrathin titania film via surface sol-gel process and photolithography
We demonstrated the fabrication of 3D nano-architectures composed of ultrathin TiO2-gel (titania) layers. Titania films with a thickness of a few tens nanometers are prepared on lithographically-fabricated line and hole patterns by the surface solgel process. Oxygen plasma treatment is employed to remove the template moiety, and gives positive replicas of the template structures.