A novel electrode, with the composition Si/TiOx/Pt/TaOx (TiOx: titanium oxide, TaOx: tantalum oxide), was fabricated by spin-coating, and its effectiveness at electrochemical ozone generation was compared with that of a traditional Pt plate electrode. The electrode achieved a high current efficiency (1.3%) at a low current density (30 mA center dot cm(-2)). The results confirm that TaOx is effective for the ozone generation in electrochemical ozone generation.